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Summary

An aligner is a major piece of equipment used in semiconductor device fabrication. Trending from upper left to lower right is the wafer-track system of a photolithographic cell that uses the "i-line" from a mercury arc lamp (wavelength 365 nm) to expose photoresist deposited on silicon wafers. Wafers are robotically loaded from a carrier at the left hand of the system and progressively are coated with photoresist, exposed to ultraviolet light, and "developed". The development step involves using a solvent to remove either the exposed (positive photoresist) or unexposed (negative photoresist) portions of the film. In the foreground is a black plastic box containing silicon wafers with a diameter of 6" (150 mm).

Photo taken at HP Labs by Alison Chaiken using a Nikon 995 camera. Note that the light in the room really is yellow!

Licensing

GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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depicts English

copyrighted English

media type English

image/jpeg

ISO speed English

100

exposure time English

0.036363636363636 second

f-number English

2.7

focal length English

8.9 millimetre

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Data/HoraMiniaturaDimensionsUsuariDescripció
actual02:11 3 feb 2006Miniatura de la versió de 02:11 3 feb 20062048 × 1536 (577 kB)wikimediacommons>ChaikenAn '''aligner''' is a major piece of equipment used in semiconductor device fabrication.Trending from upper left to lower right is the wafer-track system of a photolithographic aligner that us

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